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The Effects of Precursor C(2)H(2) Fraction on Microstructure and Properties of Amorphous Carbon Composite Films Containing Si and Ag Prepared by Magnetron Sputtering Deposition
Hydrogenated graphite-like carbon composite films containing silicon (Si) and silver (Ag) (g-C:H:Si:Ag) were prepared by middle frequency magnetron sputtering deposition in argon (Ar) and acetylene (C(2)H(2)) mixture gases. The effects of precursor C(2)H(2) fraction on the microstructure and propert...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523700/ https://www.ncbi.nlm.nih.gov/pubmed/30987154 http://dx.doi.org/10.3390/nano9040528 |