Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO(2) Chemical Mechanical Planarization Performance

Based on a previous work where we investigated the effect of conditioner type and downforce on the evolution of pad surface micro-texture during break-in, we have chosen certain break-in conditions to carry out subsequent blanket SiO(2) wafer polishing studies. Two different conditioner discs were u...

Descripción completa

Detalles Bibliográficos
Autores principales: McAllister, Jeffrey, Stuffle, Calliandra, Sampurno, Yasa, Hetherington, Dale, Sierra Suarez, Jon, Borucki, Leonard, Philipossian, Ara
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523751/
https://www.ncbi.nlm.nih.gov/pubmed/31003465
http://dx.doi.org/10.3390/mi10040258

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523751/
https://www.ncbi.nlm.nih.gov/pubmed/31003465
http://dx.doi.org/10.3390/mi10040258

Ejemplares similares