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Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO(2) Chemical Mechanical Planarization Performance
Based on a previous work where we investigated the effect of conditioner type and downforce on the evolution of pad surface micro-texture during break-in, we have chosen certain break-in conditions to carry out subsequent blanket SiO(2) wafer polishing studies. Two different conditioner discs were u...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523751/ https://www.ncbi.nlm.nih.gov/pubmed/31003465 http://dx.doi.org/10.3390/mi10040258 |