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MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control

In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that th...

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Detalles Bibliográficos
Autores principales: Cui, Min, Huang, Yong, Wang, Wei, Cao, Huiliang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523767/
https://www.ncbi.nlm.nih.gov/pubmed/31013981
http://dx.doi.org/10.3390/mi10040248