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MEMS Gyroscope Temperature Compensation Based on Drive Mode Vibration Characteristic Control
In this paper, a novel temperature compensation method for a dual-mass MEMS gyroscope is proposed based on drive mode vibration characteristic compensation using a temperature variable resistor. Firstly, the drive and sense modes of the gyroscope re analyzed and investigated, and it is found that th...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523767/ https://www.ncbi.nlm.nih.gov/pubmed/31013981 http://dx.doi.org/10.3390/mi10040248 |