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3-D Design and Simulation of a Piezoelectric Micropump

The objective of this paper is to carefully study the performances of a new piezoelectric micropump that could be used, e.g., for drug delivery or micro-cooling systems. The proposed micropump is characterized by silicon diaphragms, with a piezoelectric actuation at a 60 V input voltage, and by two...

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Detalles Bibliográficos
Autores principales: Farshchi Yazdi, Seyed Amir Fouad, Corigliano, Alberto, Ardito, Raffaele
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6523882/
https://www.ncbi.nlm.nih.gov/pubmed/31003481
http://dx.doi.org/10.3390/mi10040259