Size and shape control of a variety of metallic nanostructures using tilted, rotating evaporation and lithographic lift-off techniques

Here, we demonstrate a simple top-down method for nanotechnology whereby electron beam (ebeam) lithography can be combined with tilted, rotated thermal evaporation to control the topography and size of an assortment of metallic objects at the nanometre scale. In order to do this, the evaporation til...

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Detalles Bibliográficos
Autores principales: Eschimese, Damien, Vaurette, François, Troadec, David, Leveque, Gaëtan, Melin, Thierry, Arscott, Steve
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6531472/
https://www.ncbi.nlm.nih.gov/pubmed/31118461
http://dx.doi.org/10.1038/s41598-019-44074-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6531472/
https://www.ncbi.nlm.nih.gov/pubmed/31118461
http://dx.doi.org/10.1038/s41598-019-44074-w

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