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Size and shape control of a variety of metallic nanostructures using tilted, rotating evaporation and lithographic lift-off techniques
Here, we demonstrate a simple top-down method for nanotechnology whereby electron beam (ebeam) lithography can be combined with tilted, rotated thermal evaporation to control the topography and size of an assortment of metallic objects at the nanometre scale. In order to do this, the evaporation til...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6531472/ https://www.ncbi.nlm.nih.gov/pubmed/31118461 http://dx.doi.org/10.1038/s41598-019-44074-w |