Classifying Image Stacks of Specular Silicon Wafer Back Surface Regions: Performance Comparison of CNNs and SVMs

In this work, we compare the performance of convolutional neural networks and support vector machines for classifying image stacks of specular silicon wafer back surfaces. In these image stacks, we can identify structures typically originating from replicas of chip structures or from grinding artifa...

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Detalles Bibliográficos
Autores principales: Kofler, Corinna, Muhr, Robert, Spöck, Gunter
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6539889/
https://www.ncbi.nlm.nih.gov/pubmed/31052579
http://dx.doi.org/10.3390/s19092056

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6539889/
https://www.ncbi.nlm.nih.gov/pubmed/31052579
http://dx.doi.org/10.3390/s19092056

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