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Classifying Image Stacks of Specular Silicon Wafer Back Surface Regions: Performance Comparison of CNNs and SVMs
In this work, we compare the performance of convolutional neural networks and support vector machines for classifying image stacks of specular silicon wafer back surfaces. In these image stacks, we can identify structures typically originating from replicas of chip structures or from grinding artifa...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6539889/ https://www.ncbi.nlm.nih.gov/pubmed/31052579 http://dx.doi.org/10.3390/s19092056 |