Scalable Epitaxial Growth of WSe(2) Thin Films on SiO(2)/Si via a Self-Assembled PtSe(2) Buffer Layer

The growth of large-area epitaxial transition metal dichalgogenides (TMDCs) are of central importance for scalable integrated device applications. Different methods have been developed to achieve large-sized high quality films. However, reliable approaches for centimeter-sized or even wafer-level ep...

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Detalles Bibliográficos
Autores principales: Wu, Pei-Chen, Yang, Chun-Liang, Du, Yuanmin, Lai, Chih-Huang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6541630/
https://www.ncbi.nlm.nih.gov/pubmed/31142782
http://dx.doi.org/10.1038/s41598-019-44518-3

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6541630/
https://www.ncbi.nlm.nih.gov/pubmed/31142782
http://dx.doi.org/10.1038/s41598-019-44518-3

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