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Scalable Epitaxial Growth of WSe(2) Thin Films on SiO(2)/Si via a Self-Assembled PtSe(2) Buffer Layer
The growth of large-area epitaxial transition metal dichalgogenides (TMDCs) are of central importance for scalable integrated device applications. Different methods have been developed to achieve large-sized high quality films. However, reliable approaches for centimeter-sized or even wafer-level ep...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6541630/ https://www.ncbi.nlm.nih.gov/pubmed/31142782 http://dx.doi.org/10.1038/s41598-019-44518-3 |