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Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy
Gratings, one of the most important energy dispersive devices, are the fundamental building blocks for the majority of optical and optoelectronic systems. The grating period is the key parameter that limits the dispersion and resolution of the system. With the rapid development of large X-ray scienc...
Autores principales: | , , , , , , , , , , , , , , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6547753/ https://www.ncbi.nlm.nih.gov/pubmed/31164646 http://dx.doi.org/10.1038/s41467-019-10095-2 |