Realization of wafer-scale nanogratings with sub-50 nm period through vacancy epitaxy

Gratings, one of the most important energy dispersive devices, are the fundamental building blocks for the majority of optical and optoelectronic systems. The grating period is the key parameter that limits the dispersion and resolution of the system. With the rapid development of large X-ray scienc...

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Detalles Bibliográficos
Autores principales: Huang, Qiushi, jia, Qi, Feng, Jiangtao, Huang, Hao, Yang, Xiaowei, Grenzer, Joerg, Huang, Kai, Zhang, Shibing, Lin, Jiajie, Zhou, Hongyan, You, Tiangui, Yu, Wenjie, Facsko, Stefan, Jonnard, Philippe, Wu, Meiyi, Giglia, Angelo, Zhang, Zhong, Liu, Zhi, Wang, Zhanshan, Wang, Xi, Ou, Xin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6547753/
https://www.ncbi.nlm.nih.gov/pubmed/31164646
http://dx.doi.org/10.1038/s41467-019-10095-2

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