Scaling growth rates for perovskite oxide virtual substrates on silicon

The availability of native substrates is a cornerstone in the development of microelectronic technologies relying on epitaxial films. If native substrates are not available, virtual substrates - crystalline buffer layers epitaxially grown on a structurally dissimilar substrate - offer a solution. Re...

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Detalles Bibliográficos
Autores principales: Lapano, Jason, Brahlek, Matthew, Zhang, Lei, Roth, Joseph, Pogrebnyakov, Alexej, Engel-Herbert, Roman
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6549169/
https://www.ncbi.nlm.nih.gov/pubmed/31165726
http://dx.doi.org/10.1038/s41467-019-10273-2

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6549169/
https://www.ncbi.nlm.nih.gov/pubmed/31165726
http://dx.doi.org/10.1038/s41467-019-10273-2

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