Fabrication and Characteristic of a Double Piezoelectric Layer Acceleration Sensor Based on Li-Doped ZnO Thin Film

In this paper, a double piezoelectric layer acceleration sensor based on Li-doped ZnO (LZO) thin film is presented. It is constituted by Pt/LZO/Pt/LZO/Pt/Ti functional layers and a Si cantilever beam with a proof mass. The LZO thin films were prepared by radio frequency (RF) magnetron sputtering. Th...

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Detalles Bibliográficos
Autores principales: Ai, Chunpeng, Zhao, Xiaofeng, Li, Sen, Li, Yi, Bai, Yinnan, Wen, Dianzhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562375/
https://www.ncbi.nlm.nih.gov/pubmed/31108993
http://dx.doi.org/10.3390/mi10050331

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562375/
https://www.ncbi.nlm.nih.gov/pubmed/31108993
http://dx.doi.org/10.3390/mi10050331

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