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Fabrication and Characteristic of a Double Piezoelectric Layer Acceleration Sensor Based on Li-Doped ZnO Thin Film

In this paper, a double piezoelectric layer acceleration sensor based on Li-doped ZnO (LZO) thin film is presented. It is constituted by Pt/LZO/Pt/LZO/Pt/Ti functional layers and a Si cantilever beam with a proof mass. The LZO thin films were prepared by radio frequency (RF) magnetron sputtering. Th...

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Detalles Bibliográficos
Autores principales:	Ai, Chunpeng, Zhao, Xiaofeng, Li, Sen, Li, Yi, Bai, Yinnan, Wen, Dianzhong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562375/ https://www.ncbi.nlm.nih.gov/pubmed/31108993 http://dx.doi.org/10.3390/mi10050331

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