Dynamic Analysis of a Micro Beam-Based Tactile Sensor Actuated by Fringing Electrostatic Fields

A new kind of fringing electrostatic actuation mode is developed. In this new actuation mode, the expression of fringing electrostatic force is found. The nonlinear dynamic analysis of this new actuation mode is presented by using the Method of Multiple Scales. An experiment is designed to observe t...

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Detalles Bibliográficos
Autores principales: Wang, Zhichong, Zhang, Qichang, Wang, Wei, Han, Jianxin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562637/
https://www.ncbi.nlm.nih.gov/pubmed/31091756
http://dx.doi.org/10.3390/mi10050324

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562637/
https://www.ncbi.nlm.nih.gov/pubmed/31091756
http://dx.doi.org/10.3390/mi10050324

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