PMMA-Based Wafer-Bonded Capacitive Micromachined Ultrasonic Transducer for Underwater Applications

This article presents a new wafer-bonding fabrication technique for Capacitive Micromachined Ultrasonic Transducers (CMUTs) using polymethyl methacrylate (PMMA). The PMMA-based single-mask and single-dry-etch step-bonding device is much simpler, and reduces process steps and cost as compared to othe...

Descripción completa

Detalles Bibliográficos
Autores principales: Ahmad, Mansoor, Bozkurt, Ayhan, Farhanieh, Omid
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562750/
https://www.ncbi.nlm.nih.gov/pubmed/31083578
http://dx.doi.org/10.3390/mi10050319

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562750/
https://www.ncbi.nlm.nih.gov/pubmed/31083578
http://dx.doi.org/10.3390/mi10050319

Ejemplares similares