A Nanomechanical Analysis of Deformation Characteristics of 6H-SiC Using an Indenter and Abrasives in Different Fixed Methods

The super-precise theory for machining single crystal SiC substrates with abrasives needs to be improved for its chemical stability, extremely hard and brittle. A Berkovich indenter was used to carry out a systematic static stiffness indentation experiments on single crystal 6H-SiC substrates, and t...

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Detalles Bibliográficos
Autores principales: Pan, Jisheng, Yan, Qiusheng, Li, Weihua, Zhang, Xiaowei
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562772/
https://www.ncbi.nlm.nih.gov/pubmed/31109106
http://dx.doi.org/10.3390/mi10050332

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562772/
https://www.ncbi.nlm.nih.gov/pubmed/31109106
http://dx.doi.org/10.3390/mi10050332

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