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A Nanomechanical Analysis of Deformation Characteristics of 6H-SiC Using an Indenter and Abrasives in Different Fixed Methods

The super-precise theory for machining single crystal SiC substrates with abrasives needs to be improved for its chemical stability, extremely hard and brittle. A Berkovich indenter was used to carry out a systematic static stiffness indentation experiments on single crystal 6H-SiC substrates, and t...

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Detalles Bibliográficos
Autores principales:	Pan, Jisheng, Yan, Qiusheng, Li, Weihua, Zhang, Xiaowei
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562772/ https://www.ncbi.nlm.nih.gov/pubmed/31109106 http://dx.doi.org/10.3390/mi10050332

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