Concentric Split Aluminum with Silicon-Aluminum Nitride Annular Rings Resonators

This paper presents a novel approach of annular concentric split rings microelectromechanical resonators with tether configuration to reduce anchor loss and gives very high-quality factor (Q) 2.97 Million based on FEA (Finite Element Analysis) simulation. The operating frequencies of these resonator...

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Detalles Bibliográficos
Autores principales: Khan, Muhammad Ammar, Bao, Jing-Fu, Bao, Fei-Hong, Zhou, Xin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562899/
https://www.ncbi.nlm.nih.gov/pubmed/31052249
http://dx.doi.org/10.3390/mi10050296

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562899/
https://www.ncbi.nlm.nih.gov/pubmed/31052249
http://dx.doi.org/10.3390/mi10050296

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