A Rapid Thermal Nanoimprint Apparatus through Induction Heating of Nickel Mold

Thermal nanoimprint lithography is playing a vital role in fabricating micro/nanostructures on polymer materials by the advantages of low cost, high throughput, and high resolution. However, a typical thermal nanoimprint process usually takes tens of minutes due to the relatively low heating and coo...

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Detalles Bibliográficos
Autores principales: Fu, Xinxin, Chen, Qian, Chen, Xinyu, Zhang, Liang, Yang, Aibin, Cui, Yushuang, Yuan, Changsheng, Ge, Haixiong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562963/
https://www.ncbi.nlm.nih.gov/pubmed/31117326
http://dx.doi.org/10.3390/mi10050334

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562963/
https://www.ncbi.nlm.nih.gov/pubmed/31117326
http://dx.doi.org/10.3390/mi10050334

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