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A Rapid Thermal Nanoimprint Apparatus through Induction Heating of Nickel Mold
Thermal nanoimprint lithography is playing a vital role in fabricating micro/nanostructures on polymer materials by the advantages of low cost, high throughput, and high resolution. However, a typical thermal nanoimprint process usually takes tens of minutes due to the relatively low heating and coo...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562963/ https://www.ncbi.nlm.nih.gov/pubmed/31117326 http://dx.doi.org/10.3390/mi10050334 |