Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration

Microelectromechanical switch has become an essential component in a wide variety of applications, ranging from biomechanics and aerospace engineering to consumer electronics. Electrostatically actuated microbeams and microplates are chief parts of many MEMS instruments. In this study, the nonlinear...

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Detalles Bibliográficos
Autores principales: Ma, Chicheng, Cao, Limin, Li, Lei, Shao, Mingyu, Jing, Dong, Guo, Zonghe
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562969/
https://www.ncbi.nlm.nih.gov/pubmed/31083425
http://dx.doi.org/10.3390/mi10050315

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562969/
https://www.ncbi.nlm.nih.gov/pubmed/31083425
http://dx.doi.org/10.3390/mi10050315

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