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Nonlinear Behavior of Electrostatically Actuated Microbeams with Coupled Longitudinal–Transversal Vibration
Microelectromechanical switch has become an essential component in a wide variety of applications, ranging from biomechanics and aerospace engineering to consumer electronics. Electrostatically actuated microbeams and microplates are chief parts of many MEMS instruments. In this study, the nonlinear...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6562969/ https://www.ncbi.nlm.nih.gov/pubmed/31083425 http://dx.doi.org/10.3390/mi10050315 |