An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability

This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination...

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Detalles Bibliográficos
Autores principales: Zhou, Liang, Zhang, Xiaoyang, Xie, Huikai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6563100/
https://www.ncbi.nlm.nih.gov/pubmed/31091696
http://dx.doi.org/10.3390/mi10050323

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6563100/
https://www.ncbi.nlm.nih.gov/pubmed/31091696
http://dx.doi.org/10.3390/mi10050323

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