An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability

This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination...

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Detalles Bibliográficos
Autores principales: Zhou, Liang, Zhang, Xiaoyang, Xie, Huikai
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6563100/
https://www.ncbi.nlm.nih.gov/pubmed/31091696
http://dx.doi.org/10.3390/mi10050323
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author Zhou, Liang
Zhang, Xiaoyang
Xie, Huikai
author_facet Zhou, Liang
Zhang, Xiaoyang
Xie, Huikai
author_sort Zhou, Liang
collection PubMed
description This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination of surface and bulk micromachining. The piston displacement and tip-tilt optical angle of the mirror plate of the fabricated MEMS mirror are around 114 μm and ±8°, respectively at only 2.35 V. The measured response time is 7.3 ms. The piston and tip-tilt resonant frequencies are measured to be 1.5 kHz and 2.7 kHz, respectively. The MEMS mirror survived 220 billion scanning cycles with little change of its scanning characteristics, indicating that the MEMS mirror is stable and reliable.
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spelling pubmed-65631002019-06-17 An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability Zhou, Liang Zhang, Xiaoyang Xie, Huikai Micromachines (Basel) Article This paper presents the design, fabrication, and characterization of an electrothermal MEMS mirror with large tip, tilt and piston scan. This MEMS mirror is based on electrothermal bimorph actuation with Cu and W thin-film layers forming the bimorphs. The MEMS mirror is fabricated via a combination of surface and bulk micromachining. The piston displacement and tip-tilt optical angle of the mirror plate of the fabricated MEMS mirror are around 114 μm and ±8°, respectively at only 2.35 V. The measured response time is 7.3 ms. The piston and tip-tilt resonant frequencies are measured to be 1.5 kHz and 2.7 kHz, respectively. The MEMS mirror survived 220 billion scanning cycles with little change of its scanning characteristics, indicating that the MEMS mirror is stable and reliable. MDPI 2019-05-14 /pmc/articles/PMC6563100/ /pubmed/31091696 http://dx.doi.org/10.3390/mi10050323 Text en © 2019 by the authors. Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (http://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Zhou, Liang
Zhang, Xiaoyang
Xie, Huikai
An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
title An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
title_full An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
title_fullStr An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
title_full_unstemmed An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
title_short An Electrothermal Cu/W Bimorph Tip-Tilt-Piston MEMS Mirror with High Reliability
title_sort electrothermal cu/w bimorph tip-tilt-piston mems mirror with high reliability
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6563100/
https://www.ncbi.nlm.nih.gov/pubmed/31091696
http://dx.doi.org/10.3390/mi10050323
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