Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System

Grating interferometry is an environmentally stable displacement measurement technique that has significant potential for identifying the position of the wafer stage. A fast and precise algorithm is required for real-time calculation of six degrees-of-freedom (DOF) displacement using phase shifts of...

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Detalles Bibliográficos
Autores principales: Ye, Weinan, Zhang, Ming, Zhu, Yu, Wang, Leijie, Hu, Jinchun, Li, Xin, Hu, Chuxiong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6566451/
https://www.ncbi.nlm.nih.gov/pubmed/31137790
http://dx.doi.org/10.3390/s19102409

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6566451/
https://www.ncbi.nlm.nih.gov/pubmed/31137790
http://dx.doi.org/10.3390/s19102409

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