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Ultraprecision Real-Time Displacements Calculation Algorithm for the Grating Interferometer System
Grating interferometry is an environmentally stable displacement measurement technique that has significant potential for identifying the position of the wafer stage. A fast and precise algorithm is required for real-time calculation of six degrees-of-freedom (DOF) displacement using phase shifts of...
| Autores principales: | , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6566451/ https://www.ncbi.nlm.nih.gov/pubmed/31137790 http://dx.doi.org/10.3390/s19102409 |