Precise Layer Control of MoTe(2) by Ozone Treatment

Transition metal dichalcogenides (TMDCs) demonstrate great potential in numerous applications. However, these applications require a precise control of layer thickness at the atomic scale. In this work, we present an in-situ study of the self-limiting oxidation process in MoTe(2) by ozone (O(3)) tre...

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Detalles Bibliográficos
Autores principales: Wang, Qiyuan, Chen, Jing, Zhang, Youwei, Hu, Laigui, Liu, Ran, Cong, Chunxiao, Qiu, Zhi-Jun
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567192/
https://www.ncbi.nlm.nih.gov/pubmed/31108879
http://dx.doi.org/10.3390/nano9050756

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567192/
https://www.ncbi.nlm.nih.gov/pubmed/31108879
http://dx.doi.org/10.3390/nano9050756

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