Design and Simulation of a Wireless SAW–Pirani Sensor with Extended Range and Sensitivity

Pressure is a critical parameter for a large number of industrial processes. The vacuum industry relies on accurate pressure measurement and control. A new compact wireless vacuum sensor was designed and simulated and is presented in this publication. The sensor combines the Pirani principle and Sur...

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Detalles Bibliográficos
Autores principales: Toto, Sofia, Nicolay, Pascal, Morini, Gian Luca, Rapp, Michael, Korvink, Jan G., Brandner, Juergen J.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567304/
https://www.ncbi.nlm.nih.gov/pubmed/31137915
http://dx.doi.org/10.3390/s19102421

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567304/
https://www.ncbi.nlm.nih.gov/pubmed/31137915
http://dx.doi.org/10.3390/s19102421

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