UV Sensitivity of MOS Structures with Silicon Nanoclusters

Selective UV sensitivity was observed in Metal-Oxide-Semiconductor structures with Si nanoclusters. Si nanocrystals and amorphous Si nanoparticles (a-Si NPs) were obtained by furnace annealing of SiO(x) films with x = 1.15 for 60 min in N(2) at 1000 and 700 °C, respectively. XPS and TEM analysis pro...

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Detalles Bibliográficos
Autores principales: Curiel, Mario, Nedev, Nicola, Paz, Judith, Perez, Oscar, Valdez, Benjamin, Mateos, David, Arias, Abraham, Nesheva, Diana, Manolov, Emil, Nedev, Roumen, Dzhurkov, Valeri
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567342/
https://www.ncbi.nlm.nih.gov/pubmed/31108833
http://dx.doi.org/10.3390/s19102277

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567342/
https://www.ncbi.nlm.nih.gov/pubmed/31108833
http://dx.doi.org/10.3390/s19102277

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