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UV Sensitivity of MOS Structures with Silicon Nanoclusters
Selective UV sensitivity was observed in Metal-Oxide-Semiconductor structures with Si nanoclusters. Si nanocrystals and amorphous Si nanoparticles (a-Si NPs) were obtained by furnace annealing of SiO(x) films with x = 1.15 for 60 min in N(2) at 1000 and 700 °C, respectively. XPS and TEM analysis pro...
| Autores principales: | , , , , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567342/ https://www.ncbi.nlm.nih.gov/pubmed/31108833 http://dx.doi.org/10.3390/s19102277 |