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Non-Contact Roughness Measurement in Sub-Micron Range by Considering Depolarization Effects

The characteristics of a surface, particularly the roughness, play an important role in different fields of the industry and have to be considered to ensure quality standards. Currently, there are numerous sophisticated methods for measuring surface roughness but plenty of them cause long-term damag...

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Detalles Bibliográficos
Autores principales: Pöller, Franziska, Salazar Bloise, Félix, Jakobi, Martin, Wang, Shengjia, Dong, Jie, Koch, Alexander W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6567356/
https://www.ncbi.nlm.nih.gov/pubmed/31091662
http://dx.doi.org/10.3390/s19102215