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Nanoscale modification of silicon and germanium surfaces exposed to low-energy helium plasma
Complex surface nanostructures were observed in germanium and silicon samples exposed to low energy (24 or 36 eV ion kinetic energy) helium plasma. Pyramidal growth is observed in germanium across the temperature range studied (185 °C to 336 °C), while significant modification in silicon was only ob...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6626129/ https://www.ncbi.nlm.nih.gov/pubmed/31300694 http://dx.doi.org/10.1038/s41598-019-46541-w |