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Strain-stress study of Al(x)Ga(1−x)N/AlN heterostructures on c-plane sapphire and related optical properties
This work presents a systematic study of stress and strain of Al(x)Ga(1−x)N/AlN with composition ranging from GaN to AlN, grown on a c-plane sapphire by metal-organic chemical vapor deposition, using synchrotron radiation high-resolution X-ray diffraction and reciprocal space mapping. The c-plane of...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6629664/ https://www.ncbi.nlm.nih.gov/pubmed/31308418 http://dx.doi.org/10.1038/s41598-019-46628-4 |