Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering

A thin-film thermocouples (TFTCs) sensor based on silicon carbide substrate, 95 wt% tungsten–5 wt% rhenium (W-5Re) and 74 wt% tungsten–26 wt% rhenium (W-26Re) thermosensitive part with aluminum oxide protective coating layer was designed and fabricated by radio frequency (RF) magnetron sputtering. I...

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Detalles Bibliográficos
Autores principales: Zhang, Zhongkai, Tian, Bian, Liu, Yan, Du, Zhe, Lin, Qijing, Jiang, Zhuangde
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6630212/
https://www.ncbi.nlm.nih.gov/pubmed/31226740
http://dx.doi.org/10.3390/ma12121981

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6630212/
https://www.ncbi.nlm.nih.gov/pubmed/31226740
http://dx.doi.org/10.3390/ma12121981

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