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Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth

This paper presents the design, fabrication, and characterization of a highly sensitive, single drive multi-axis gyroscope. The multi-axis gyroscope allows for a wide bandwidth in all three axes (X, Y, Z) and exhibits high linearity. The fabricated multi-axis gyroscope was fabricated with a structur...

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Detalles Bibliográficos
Autores principales: Iqbal, Faisal, Din, Hussamud, Lee, Byeungleul
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6631234/
https://www.ncbi.nlm.nih.gov/pubmed/31226741
http://dx.doi.org/10.3390/mi10060410