Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth

This paper presents the design, fabrication, and characterization of a highly sensitive, single drive multi-axis gyroscope. The multi-axis gyroscope allows for a wide bandwidth in all three axes (X, Y, Z) and exhibits high linearity. The fabricated multi-axis gyroscope was fabricated with a structural thickness of 30 µm and packaged at 100 mtorr using wafer level packaging. The fabricated multi-axis gyroscope has a small footprint of 1426 × 1426 µm(2), making it one of the smallest multi-axis gyroscopes. A custom printed circuit board (PCB) was designed for the evaluation of the multi-axis gyroscope. The experimental results demonstrate that the gyroscope has a high sensitivity of [Formula: see text] and [Formula: see text] in the roll (X-sense), pitch (Y-sense) and yaw (Z-sense) modes respectively. The scale-factor non-linearity of the gyroscope is less than [Formula: see text] for roll and pitch mode and [Formula: see text] for the yaw mode, in the full-scale range of [Formula: see text]. The multi-axis gyroscope demonstrates an angle random walk of [Formula: see text] , [Formula: see text] , and [Formula: see text] , for the roll, pitch and yaw rate with the in-run bias stability [Formula: see text] , [Formula: see text] and [Formula: see text] respectively.