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Single Drive Multi-Axis Gyroscope with High Dynamic Range, High Linearity and Wide Bandwidth
This paper presents the design, fabrication, and characterization of a highly sensitive, single drive multi-axis gyroscope. The multi-axis gyroscope allows for a wide bandwidth in all three axes (X, Y, Z) and exhibits high linearity. The fabricated multi-axis gyroscope was fabricated with a structur...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2019
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6631234/ https://www.ncbi.nlm.nih.gov/pubmed/31226741 http://dx.doi.org/10.3390/mi10060410 |