A New Design of an MOEMS Gyroscope Based on a WGM Microdisk Resonator

In this paper, we present a new design for a micro-opto-electro-mechanical (MOEMS) gyroscope based on a whispering-gallery mode (WGM) microdisk resonator and MEMS resonator. The mechanical characteristics, frequency split, and quality factor (Q) of the MEMS resonator; the optical characteristics, Q...

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Detalles Bibliográficos
Autores principales: Xia, Dunzhu, Huang, Lingchao, Zhao, Liye
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6631629/
https://www.ncbi.nlm.nih.gov/pubmed/31234467
http://dx.doi.org/10.3390/s19122798

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6631629/
https://www.ncbi.nlm.nih.gov/pubmed/31234467
http://dx.doi.org/10.3390/s19122798

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