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Ge nanoparticles in SiO(2) for near infrared photodetectors with high performance
In this work we prepared films of amorphous germanium nanoparticles embedded in SiO(2) deposited by magnetron sputtering on Si and quartz heated substrates at 300, 400 and 500 °C. Structure, morphology, optical, electrical and photoconduction properties of all films were investigated. The Ge concent...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6635504/ https://www.ncbi.nlm.nih.gov/pubmed/31312003 http://dx.doi.org/10.1038/s41598-019-46711-w |