Cargando…
Multimaterial Nanoporous Membranes Shaped through High Aspect-Ratio Sacrificial Silicon Nanostructures
[Image: see text] We present an innovative fabrication method for solid-state nanoporous membranes based on the casting of sacrificial silicon nanostructures. The process allows the individual definition of geometry and placement of each nanopore through e-beam lithography and is compatible with a w...
| Autores principales: | , , , |
|---|---|
| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2017
|
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6640980/ https://www.ncbi.nlm.nih.gov/pubmed/31457588 http://dx.doi.org/10.1021/acsomega.7b00084 |