Shape Transformation Photolithography: Self-Assembled Arrays of Suspended MEMS Structures from Patterned Polymer Membranes

[Image: see text] Suspended micromechanical structures are typically formed by dissolving underlying spacer material. However, capillary force-induced collapse during solvent removal can damage soft structures. If instead capillary forces are directed in the plane, they can drive liquid polymeric br...

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Detalles Bibliográficos
Autores principales: Sherehiy, Andriy, Rathfon, Jeremy M., Abe, Hiroya, Chowdhury, Sri Sukanta, Cohn, Robert W.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2018
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6644290/
https://www.ncbi.nlm.nih.gov/pubmed/31458421
http://dx.doi.org/10.1021/acsomega.8b02763

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6644290/
https://www.ncbi.nlm.nih.gov/pubmed/31458421
http://dx.doi.org/10.1021/acsomega.8b02763

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