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Sol–Gel PMMA–ZrO(2) Hybrid Layers as Gate Dielectric for Low-Temperature ZnO-Based Thin-Film Transistors

[Image: see text] We report a simple sol–gel process for the deposition of poly(methyl methacrylate) (PMMA)–ZrO(2) organic–inorganic hybrid films at low temperature and studied their properties as a function of the molar ratios of the precursors in the hybrid sol–gel solution, which included zirconi...

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Detalles Bibliográficos
Autores principales: Alvarado-Beltrán, Clemente G., Almaral-Sánchez, Jorge L., Mejia, Israel, Quevedo-López, Manuel A., Ramirez-Bon, Rafael
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2017
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6645328/
https://www.ncbi.nlm.nih.gov/pubmed/31457280
http://dx.doi.org/10.1021/acsomega.7b00552