Cargando…
Improvements in structural and optical properties of wafer-scale hexagonal boron nitride film by post-growth annealing
Remarkable improvements in both structural and optical properties of wafer-scale hexagonal boron nitride (h-BN) films grown by metal-organic chemical vapor deposition (MOCVD) enabled by high-temperature post-growth annealing is presented. The enhanced crystallinity and homogeneity of the MOCVD-grown...
Autores principales: | , , , , , , , , , , , , |
---|---|
Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Nature Publishing Group UK
2019
|
Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6646322/ https://www.ncbi.nlm.nih.gov/pubmed/31332250 http://dx.doi.org/10.1038/s41598-019-47093-9 |