Effects of carbon concentration on high-hardness plasma-polymer-fluorocarbon film deposited by mid-range frequency sputtering

We propose a method for fabricating high-hardness plasma-polymer-fluorocarbon (PPFC) thin films with controllable optical and surface properties via manipulation of the target composition design and sputtering power density. The carbon/polytetrafluoroethylene (PTFE) composite polymeric material targ...

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Detalles Bibliográficos
Autores principales: Kim, Sung Hyun, Kim, Mac, Um, Min Seop, Choi, Woo Jin, Lee, Jae Heung, Yang, Yong Suk, Lee, Sang-Jin
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6650446/
https://www.ncbi.nlm.nih.gov/pubmed/31337795
http://dx.doi.org/10.1038/s41598-019-46993-0

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6650446/
https://www.ncbi.nlm.nih.gov/pubmed/31337795
http://dx.doi.org/10.1038/s41598-019-46993-0

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