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Effects of carbon concentration on high-hardness plasma-polymer-fluorocarbon film deposited by mid-range frequency sputtering

We propose a method for fabricating high-hardness plasma-polymer-fluorocarbon (PPFC) thin films with controllable optical and surface properties via manipulation of the target composition design and sputtering power density. The carbon/polytetrafluoroethylene (PTFE) composite polymeric material targ...

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Detalles Bibliográficos
Autores principales:	Kim, Sung Hyun, Kim, Mac, Um, Min Seop, Choi, Woo Jin, Lee, Jae Heung, Yang, Yong Suk, Lee, Sang-Jin
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	Nature Publishing Group UK 2019
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6650446/ https://www.ncbi.nlm.nih.gov/pubmed/31337795 http://dx.doi.org/10.1038/s41598-019-46993-0

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