The Investigation of a SAW Oxygen Gas Sensor Operated at Room Temperature, Based on Nanostructured Zn(x)Fe(y)O Films

In this paper, we report a wireless gas sensor based on surface acoustic waves (SAW). For room temperature detection of oxygen gas, a novel nanostructured Zn(x)Fe(y)O gas-sensitive film was deposited on the surface of a SAW resonator by an oblique magnetron co-sputtering method. The measurements of...

Descripción completa

Detalles Bibliográficos
Autores principales: Shu, Lin, Jiang, Tao, Xia, Yudong, Wang, Xuemin, Yan, Dawei, Wu, Weidong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2019
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6650955/
https://www.ncbi.nlm.nih.gov/pubmed/31324036
http://dx.doi.org/10.3390/s19133025

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC6650955/
https://www.ncbi.nlm.nih.gov/pubmed/31324036
http://dx.doi.org/10.3390/s19133025

Ejemplares similares